3-D micro-structure measurement method based on shadow moiré using Scanning

The novel precise three dimensional shape measurement method using SEM and moiré topography has been proposed. The possibility for measurement of wave length order by this method has been discussed using the results of experiments for confirming the principle of this idea. In the experiments, the method with high resolution power based on the new measurement method is also proposed by employing the fringe scanning technology for the shadow moiré. The optical system is constructed with SEM using backscattering electrons, the grating holder which can shift the position of the grating, and the grating of which the pitch is 120 micro meter. Measured results using a bearing ball as a sample show that the high resolution measurement around one macro meter can be performed by introducing the fringe scanning method to the new measurement.